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MS | Articles | Volume 9, issue 2
Mech. Sci., 9, 417-429, 2018
https://doi.org/10.5194/ms-9-417-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
Mech. Sci., 9, 417-429, 2018
https://doi.org/10.5194/ms-9-417-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.

Research article 21 Nov 2018

Research article | 21 Nov 2018

Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation

Zhigang Wu et al.
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This paper is done based on the research result for my research program. Testing results indicate that the maximal cross coupling of the 2-DOF micro-positioning stage is less than 0.1% under the full workspace with the natural frequency of 348.31Hz. The purpose of all work is to design a compliant mechanism for applying the micro-nano-positioning system. And that this work also extends my research interest in my PhD period.
This paper is done based on the research result for my research program. Testing results...
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