Articles | Volume 9, issue 2
https://doi.org/10.5194/ms-9-417-2018
https://doi.org/10.5194/ms-9-417-2018
Research article
 | 
21 Nov 2018
Research article |  | 21 Nov 2018

Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation

Zhigang Wu, Yangmin Li, and Min Hu

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Choi, S. B., Han, S. S., Han, Y. M., and Thompson, B. S.: A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: design and experimental validation, Mech. Mach. Theory, 42, 1184–1198, 2007. a
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Dong, Y., Gao, F., and Yue, Y.: Modeling and experimental study of a novel 3-RPR parallel micro-manipulator, Robot. Cim.-Int. Manuf., 37, 115–126, 2016. a
Fan, S., Liu, H., and Fan, D.: Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity, Mech. Sci., 9, 161–176, 2018. a
Hao, G., Li, H., and Kavanagh, R.: Design of Decoupled, Compact, and Monolithic Spatial Translational Compliant Parallel Manipulators Based on the Position Space Concept, P. I. Mech. Eng. C–J. Mec., 230, 367–378, 2016. a
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This paper is done based on the research result for my research program. Testing results indicate that the maximal cross coupling of the 2-DOF micro-positioning stage is less than 0.1% under the full workspace with the natural frequency of 348.31Hz. The purpose of all work is to design a compliant mechanism for applying the micro-nano-positioning system. And that this work also extends my research interest in my PhD period.