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Mechanical Sciences An open-access journal for theoretical and applied mechanics
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Volume 9, issue 2
Mech. Sci., 9, 417-429, 2018
https://doi.org/10.5194/ms-9-417-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
Mech. Sci., 9, 417-429, 2018
https://doi.org/10.5194/ms-9-417-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.

Research article 21 Nov 2018

Research article | 21 Nov 2018

Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation

Zhigang Wu1, Yangmin Li2, and Min Hu1 Zhigang Wu et al.
  • 1The School of Energy and Machinery Engineering, Jiangxi University of Science and Technology, Nanchang 330013, China
  • 2Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong, Hong Kong

Abstract. Nano-positioning is widely used in Micro-electromechanical Systems (MEMS), micromanipulator and biomedicine, coupling errors and tiny output displacements are the main disadvantages of the one. A totally uncoupled micro/nano-positioning stage with lever amplifiers is designed and tested in this paper. It is fully symmetrical along with the x- and y-directions. For obtaining large output displacements, two fully symmetric two-stage lever displacement amplifiers are utilized to amplify output displacements of piezoelectric actuators (PZTs). The established models for performances evaluation of the stage, in terms of kinetostatics, amplification ratio, reachable workspace, the input and output stiffness, are verified by finite element analysis (FEA). After that, the dimensional optimization is also carried out through the genetic optimization algorithm.The prototype of the mechanism is fabricated by using Wire-Electrical-Discharge-Machining (WEDM) process. Testing results indicate that the proposed micromanipulator demonstrates good performance.

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This paper is done based on the research result for my research program. Testing results indicate that the maximal cross coupling of the 2-DOF micro-positioning stage is less than 0.1% under the full workspace with the natural frequency of 348.31Hz. The purpose of all work is to design a compliant mechanism for applying the micro-nano-positioning system. And that this work also extends my research interest in my PhD period.
This paper is done based on the research result for my research program. Testing results...
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