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Mechanical Sciences An open-access journal for theoretical and applied mechanics

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Mech. Sci., 9, 41-50, 2018
https://doi.org/10.5194/ms-9-41-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
Research article
31 Jan 2018
A self-adjusting stiffness center design for large stroke compliant XY nanomanipulators
Zhiqing Liu1,3, Zhen Zhang1,2,3, and Peng Yan4 1State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Tsinghua University, Beijing 100084, China
2Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, Tsinghua University, 100084, China
3Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
4Key Laboratory of High-Efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China
Abstract. In the present paper, it is proposed a self-adjusting stiffness center (SASC) design for large stroke XY beam flexure-based mechanisms. An important feature of the SASC lies in it restricts the in-plane parasitic rotation by reducing the moment of force instead of increasing the rotational stiffness widely utilized in the literature. Specifically, it is shown that by leveraging on the varied stiffness of the parallelogram flexure, the stiffness center can be made stationary by appropriately setting the relevant geometric parameters, so that the parasitic rotation can be restricted. Furthermore, it is presented a millimeter stroke XY nanomanipulator with the SASC-based redundant constraint in a case study. Numerous finite element analysis (FEA) results demonstrate that the proposed design is not only capable of achieving 1.5 × 1.5 mm2 working range in a compact desktop size, but significantly reduces the in-plane moment applied to the motion stage. The proposed SASC-based design provides an alternative approach to reduce the parasitic rotation of large stroke XY beam flexure-based mechanisms.

Citation: Liu, Z., Zhang, Z., and Yan, P.: A self-adjusting stiffness center design for large stroke compliant XY nanomanipulators, Mech. Sci., 9, 41-50, https://doi.org/10.5194/ms-9-41-2018, 2018.
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Short summary
It is proposed a novel design method for large stroke XY compliant mechanisms. An important feature of the design lies in it restricts the parasitic rotation by reducing the moment of force instead of increasing the rotational stiffness widely utilized in the literature. It is presented a millimeter stroke XY nanomanipulator with the proposed design based redundant constraint in a case study. The proposed design provides an alternative to reduce the parasitic rotation of XY compliant mechanism.
It is proposed a novel design method for large stroke XY compliant mechanisms. An important...
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