Journal cover Journal topic
Mechanical Sciences An open-access journal for theoretical and applied mechanics
Journal topic

Journal metrics

Journal metrics

  • IF value: 1.052 IF 1.052
  • IF 5-year value: 1.567 IF 5-year
    1.567
  • CiteScore value: 1.92 CiteScore
    1.92
  • SNIP value: 1.214 SNIP 1.214
  • IPP value: 1.47 IPP 1.47
  • SJR value: 0.367 SJR 0.367
  • Scimago H <br class='hide-on-tablet hide-on-mobile'>index value: 18 Scimago H
    index 18
  • h5-index value: 16 h5-index 16
Supported by
Logo Library of Delft University of Technology Logo NWO
Affiliated to
Logo iftomm
Volume 8, issue 2
Mech. Sci., 8, 349-358, 2017
https://doi.org/10.5194/ms-8-349-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 4.0 License.
Mech. Sci., 8, 349-358, 2017
https://doi.org/10.5194/ms-8-349-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 4.0 License.

Research article 30 Nov 2017

Research article | 30 Nov 2017

A novel 5-DOF high-precision compliant parallel mechanism for large-aperture grating tiling

Zhongxi Shao, Shilei Wu, Jinguo Wu, and Hongya Fu Zhongxi Shao et al.
  • School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China

Abstract. In combination with the advantages of parallel mechanisms and compliant mechanisms, a 5-DOF compliant parallel mechanism is designed to meet the requirements, such as large stroke, large load capacity, high precision and high stability, for a large-aperture grating tiling device. The structure and characteristics of the 5-DOF compliant parallel mechanism are presented. The kinematics of the mechanism are derived based on a pseudo-rigid-body model as well. To increase the tiling position retention stability of the mechanism, a closed-loop control system with capacitive position sensors, which are employed to provide feedback signals, is realized. A position and orientation monitoring algorithm and a single neuron adaptive full closed-loop control algorithm are proposed. Performance testing is implemented to verify the accuracy and the tiling position retention stability of the grating tiling device. The experimental results indicate that the tiling accuracy reaches 0.2µrad per step and 20nm per step, and the tiling position retention stability can achieve 1.2µrad per 30min and 35nm per 30min in the rotational direction and the translational direction, respectively.

Publications Copernicus
Download
Citation
Share