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Mechanical Sciences An open-access journal for theoretical and applied mechanics

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Mech. Sci., 8, 117-126, 2017
https://doi.org/10.5194/ms-8-117-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
Research article
23 May 2017
Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system
Bingxiao Ding et al.

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Short summary
A flexure-based monolithic micro manipulation stage with large workspace is designed and analyzed. The piezoelectric actuators are adopted to drive the manipulation stage. The optimized lever amplifier is integrated into the mechanism in order to compensate the stroke of the piezoelectric actuators. The working range of the manipulation stage along each axis is ± 42.31 μm, ± 48.56 μm, 0–10.28 m rad, respectively.
A flexure-based monolithic micro manipulation stage with large workspace is designed and...
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