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Mechanical Sciences An open-access journal for theoretical and applied mechanics

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Mech. Sci., 8, 117-126, 2017
https://doi.org/10.5194/ms-8-117-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
Research article
23 May 2017
Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system
Bingxiao Ding1, Yangmin Li1,2,3, Xiao Xiao1, Yirui Tang1, and Bin Li3 1Department of Electromechanical Engineering, University of Macau, Taipa, Macao SAR, China
2Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong SAR, China
3Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin University of Technology, Tianjin, China
Abstract. Flexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The designed monolithic manipulator has three degrees of freedom (DOF), i.e. two translations along the X and Y axes and one rotation around Z axis. In order to get a large workspace, the lever mechanism is adopted to magnify the stroke of the piezoelectric actuators and also the leaf beam flexure is utilized due to its large rotational scope. Different from conventional pre-tightening mechanism, a modified pre-tightening mechanism, which is less harmful to the stacked actuators, is proposed in this paper. Taking the circular flexure hinges and leaf beam flexures hinges as revolute joints, the forward kinematics and inverse kinematics models of this stage are derived. The workspace of the micromanipulator is finally obtained, which is based on the derived kinematic models.

Citation: Ding, B., Li, Y., Xiao, X., Tang, Y., and Li, B.: Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system, Mech. Sci., 8, 117-126, https://doi.org/10.5194/ms-8-117-2017, 2017.
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Short summary
A flexure-based monolithic micro manipulation stage with large workspace is designed and analyzed. The piezoelectric actuators are adopted to drive the manipulation stage. The optimized lever amplifier is integrated into the mechanism in order to compensate the stroke of the piezoelectric actuators. The working range of the manipulation stage along each axis is ± 42.31 μm, ± 48.56 μm, 0–10.28 m rad, respectively.
A flexure-based monolithic micro manipulation stage with large workspace is designed and...
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