Abstract. The micro stick-slip motion systems, such as piezoelectric stick-slip actuators (PE-SSAs), can provide high resolution motions yet with a long motion range. In these systems, friction force plays an active role. Although numerous friction models have been developed for the control of micro motion systems, behaviors of these models in micro stick-slip motion systems are not well understood. This study (1) gives a survey of the basic friction models and (2) tests and compares 5 friction models in the literature, including Coulomb friction model, Stribeck friction model, Dahl model, LuGre model, and the elastoplastic friction model on the same test-bed (i.e. the PE-SSA system). The experiments and simulations were done and the reasons for the difference in the performance of these models were investigated. The study concluded that for the micro stick-slip motion system, (1) Stribeck model, Dahl model and LuGre model all work, but LuGre model has the best accuracy and (2) Coulomb friction model and the elastoplastic model does not work. The study provides contributions to motion control systems with friction, especially for micro stick-slip or step motion systems as well as general micro-motion systems.